JPH0173925U - - Google Patents
Info
- Publication number
- JPH0173925U JPH0173925U JP1987169700U JP16970087U JPH0173925U JP H0173925 U JPH0173925 U JP H0173925U JP 1987169700 U JP1987169700 U JP 1987169700U JP 16970087 U JP16970087 U JP 16970087U JP H0173925 U JPH0173925 U JP H0173925U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- wafer
- plate
- treatment jig
- upper plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000002787 reinforcement Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169700U JPH0173925U (en]) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169700U JPH0173925U (en]) | 1987-11-06 | 1987-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0173925U true JPH0173925U (en]) | 1989-05-18 |
Family
ID=31459992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169700U Pending JPH0173925U (en]) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0173925U (en]) |
-
1987
- 1987-11-06 JP JP1987169700U patent/JPH0173925U/ja active Pending